SFC6000D/SFM6000D Mass Flow Controllers and Meters

The heart of SFC6000D and SFM6000D products is the unsurpassed Sensirion CMOSens® technology. It combines a high-precision sensor element with state-of-the-art signal processing on a single chip, thereby providing an accurately calibrated and temperature-compensated signal. Thanks to this sensor technology, Sensirion’s flow meters and controllers achieve unmatched ratings for speed, accuracy, and repeatability at very attractive system cost. Due to the excellent long-term stability of CMOSens chips, no recalibration is required.

The SFC6000D offers ultra-fast settling time and high control range. SFC6000D and SFM6000D are factory calibrated for multiple gases, and they offer high flexibility regarding mechanical connectors, which can be exchanged with off-the-shelf components.

The high performance and low cost of SFC6000D and SFM6000D make them the best choice for a wide range of applications, such as gas flushing, FOUP, analytical instrumentation, coating and medical equipment, process automation, and gas mixing, to name a few.